Smart MEMS and Sensor Systems
Gaura, Elena Newman, Robert
Gaura, Elena
Newman, Robert
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2006
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This work is a research monograph concerning the design of Micro-Electrical-Mechanical-Systems (MEMS) based sensor systems. These systems have frequently been described as 'disruptive technology', and their design and successful deployment depends on the successful collaboration of a number of communities, including mechanical and electronic engineers, chemists, computer scientists and application specialists. The book reports original research in a number of technical fields, which are required for the implementation of an entire MEMS based sensor system. In particular, chapters 9 and 10 describe the development of a multidisciplinary design approach, based on defined interfaces delineated by the concerns of particular disciplines.
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en
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978-1-86094-493-2